FIH3608 Nanoelectronic Device Fabrication
KTH Royal Institute of Technology
Enrolled as a doctoral student
A survey of nanotechnology and applications in medicine, biotechnology and molecular electronics. The fabrication paradigms: top down (starting from established microdevice fabrication) and bottom up (starting from molecules that are arrange to self-assemble). The important steps in the process of modern microelectronic technology. Characterization methods: electrical, optical, physical, chemical. Overview of nanophysics and simulation methods.
The course content is an exhaustive treatment of nano- and microdevice fabrication and characterisation through theory and practical exercises. Applications in medicine, biotechnology and molecular electronics.
After the course, the student should be able to explain:
• the fabrication paradigms top down and bottom up
• which process steps are needed for each method respectively
• how the main process steps work
• which physical principles are limiting for fabrication and scaling of a nano- or microdevice
• should understand environmental effects of semiconductor production and be aware of relevant energy savings and efficiency technologies
After the lab course, the student should have:
• fabricated a simple nanostructure
• characterized this structure
• measured electrical properties of a submicron semiconductor device in the research environment offered by the KTH nano and microelectronics lab in Kista, Electrum Laboratory.
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